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  <xs:element id="sitm_BusinessCombinationSeparatelyRecognizedTransactionsAdditionalDisclosuresSettlement" abstract="false" name="BusinessCombinationSeparatelyRecognizedTransactionsAdditionalDisclosuresSettlement" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" abstract="false" name="PropertyPlantAndEquipmentUsefulLivesTableTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:textBlockItemType"/>
  <xs:element id="sitm_BusinessCombinationDeferredConsiderationArrangementsChangeInAmountOfDeferredConsiderationLiability" abstract="false" name="BusinessCombinationDeferredConsiderationArrangementsChangeInAmountOfDeferredConsiderationLiability" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_InternalUseSoftwareMember" abstract="true" name="InternalUseSoftwareMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_LeaseDisclosureTable" abstract="true" name="LeaseDisclosureTable" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType"/>
  <xs:element id="sitm_OfficeSpaceMember" abstract="true" name="OfficeSpaceMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_TwoThousandNineteenStockIncentivePlanMember" abstract="true" name="TwoThousandNineteenStockIncentivePlanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_DefinedContributionPlanDisclosureTextBlock" abstract="false" name="DefinedContributionPlanDisclosureTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:textBlockItemType"/>
  <xs:element id="sitm_NumberOfDistributorsRepresentingMoreThanTenPercentOfRevenue" abstract="false" name="NumberOfDistributorsRepresentingMoreThanTenPercentOfRevenue" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:integerItemType"/>
  <xs:element id="sitm_ExtendedTermOfLeases" abstract="false" name="ExtendedTermOfLeases" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="sitm_NonRecurringEngineeringServicesPolicyTextBlock" abstract="false" name="NonRecurringEngineeringServicesPolicyTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:textBlockItemType"/>
  <xs:element id="sitm_SignificantAccountingPoliciesTable" abstract="true" name="SignificantAccountingPoliciesTable" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType"/>
  <xs:element id="sitm_VincentPangrazioMember" abstract="true" name="VincentPangrazioMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="sitm_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisContingentConsiderationLiability" abstract="false" name="FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisContingentConsiderationLiability" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_ReductionOfResearchAndDevelopmentExpenses" abstract="false" name="ReductionOfResearchAndDevelopmentExpenses" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_CustomerOneMember" abstract="true" name="CustomerOneMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_LabAndManufacturingEquipmentMember" abstract="true" name="LabAndManufacturingEquipmentMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_ScheduleOfPropertyAndEquipmentAttributableToOperationsTableTextBlock" abstract="false" name="ScheduleOfPropertyAndEquipmentAttributableToOperationsTableTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:textBlockItemType"/>
  <xs:element id="sitm_PerformancePeriod" abstract="false" name="PerformancePeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="sitm_RevenueRecognizedAmortizationPeriodTerm" abstract="false" name="RevenueRecognizedAmortizationPeriodTerm" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="sitm_LiabilityBasedAwardsToBeSettledInEquityMember" abstract="true" name="LiabilityBasedAwardsToBeSettledInEquityMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_UnrealizedInterestOnHeldToMaturitySecurities" abstract="false" name="UnrealizedInterestOnHeldToMaturitySecurities" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_LionelBonnotMember" abstract="true" name="LionelBonnotMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="sitm_BonusAndRetentionPlanActualPayoutPercentages" abstract="false" name="BonusAndRetentionPlanActualPayoutPercentages" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="dtr-types1:percentItemType"/>
  <xs:element id="sitm_DeferredNonRecurringEngineeringServices" abstract="false" name="DeferredNonRecurringEngineeringServices" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_SiTimeCorporationMember" abstract="true" name="SiTimeCorporationMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_ValuationAllowancesAndReservesDeductionsCreditedToExpensesOrOtherAccounts" abstract="false" name="ValuationAllowancesAndReservesDeductionsCreditedToExpensesOrOtherAccounts" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_MultiYearPerformanceRestrictedStockUnitAwardMember" abstract="true" name="MultiYearPerformanceRestrictedStockUnitAwardMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_LeaseIncentivesReceived" abstract="false" name="LeaseIncentivesReceived" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_BusinessCombinationConsiderationArrangementsChangeInAmountOfDeferredAndContingentConsiderationLiability" abstract="false" name="BusinessCombinationConsiderationArrangementsChangeInAmountOfDeferredAndContingentConsiderationLiability" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_PercentageOfSalesCommissionFromCommonStockSold" abstract="false" name="PercentageOfSalesCommissionFromCommonStockSold" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:percentItemType"/>
  <xs:element id="sitm_SaleOfCommonStockPricePerShare" abstract="false" name="SaleOfCommonStockPricePerShare" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:perShareItemType"/>
  <xs:element id="sitm_PiyushSevaliaMember" abstract="true" name="PiyushSevaliaMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="sitm_LeaseDisclosureLineItems" abstract="true" name="LeaseDisclosureLineItems" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="sitm_PerformanceRestrictedStockUnitAwardMember" abstract="true" name="PerformanceRestrictedStockUnitAwardMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_LiabilityBasedAwardsCashSettledMember" abstract="true" name="LiabilityBasedAwardsCashSettledMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_AuraMember" abstract="true" name="AuraMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="sitm_DistributorOneMember" abstract="true" name="DistributorOneMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_NetIncomeLossAttributableToCommonStockholderAndComprehensiveIncomeLoss" abstract="false" name="NetIncomeLossAttributableToCommonStockholderAndComprehensiveIncomeLoss" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_InducementPlanMember" abstract="true" name="InducementPlanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_LiabilityBasedAwardMember" abstract="true" name="LiabilityBasedAwardMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_SignificantAccountingPoliciesLineItems" abstract="true" name="SignificantAccountingPoliciesLineItems" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="sitm_OutbreakOfCoronavirusDiseaseTwentyNineteenPolicyPolicyTextBlock" abstract="false" name="OutbreakOfCoronavirusDiseaseTwentyNineteenPolicyPolicyTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:textBlockItemType"/>
  <xs:element id="sitm_BusinessCombinationSupportServicesAgreementTerm" abstract="false" name="BusinessCombinationSupportServicesAgreementTerm" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="sitm_RevenueRecognizedPaymentTerms" abstract="false" name="RevenueRecognizedPaymentTerms" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="sitm_CashRestrictedStockUnitAwardMember" abstract="true" name="CashRestrictedStockUnitAwardMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_BusinessCombinationDeferredConsiderationLiabilityNoncurrent" abstract="false" name="BusinessCombinationDeferredConsiderationLiabilityNoncurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRFRollForward" abstract="true" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRFRollForward" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="sitm_PurchasedSoftwareMember" abstract="true" name="PurchasedSoftwareMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_ValuationAllowancesAndReservesAdditionsChargedToExpensesOrOtherAccounts" abstract="false" name="ValuationAllowancesAndReservesAdditionsChargedToExpensesOrOtherAccounts" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_AccruedCustomerRebateWaiver" abstract="false" name="AccruedCustomerRebateWaiver" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_NewHiresMember" abstract="true" name="NewHiresMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_SalesConsultingServicesFee" abstract="false" name="SalesConsultingServicesFee" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="sitm_TwentyTwentyTwoGoalsMember" abstract="true" name="TwentyTwentyTwoGoalsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_PurchasedIntangiblesMember" abstract="true" name="PurchasedIntangiblesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
  <xs:element id="sitm_SummaryOfUnrecognizedCompensationCostsAndRelatedWeightedAveragePeriodOfRecognitionTableTextBlock" abstract="false" name="SummaryOfUnrecognizedCompensationCostsAndRelatedWeightedAveragePeriodOfRecognitionTableTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:textBlockItemType"/>
  <xs:element id="sitm_BusinessCombinationIntangibleAssetsAcquiredMeasurementInput" abstract="false" name="BusinessCombinationIntangibleAssetsAcquiredMeasurementInput" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="sitm_EquityAndLiabilityBasedAwardsMember" abstract="true" name="EquityAndLiabilityBasedAwardsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types1:domainItemType"/>
</xs:schema>
